SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Laser Applications in Microelectronic and Optoelectronic Manufacturing II - Energy transfer in the laser ablation of metals
Pinho, George P., Callies, Gert, Schittenhelm, Henrik, Mueller, Robert E., Berger, Peter, Duley, Walter W., Huegel, Helmut, Dubowski, Jan J.Volume:
2991
Year:
1997
Language:
english
DOI:
10.1117/12.273733
File:
PDF, 550 KB
english, 1997