Experiment on Non-Uniformity of Material Removal on Wafer...

Solid State Phenomena 2011 / 6 Vol. 175

Experiment on Non-Uniformity of Material Removal on Wafer Surface in Wafer CMP

Su, Jian Xiu, Du, Jia Xi, Chen, Xi Qu, Ning, Xin, Kang, Ren Ke
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Volume:
175
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.175.187
Date:
June, 2011
File:
PDF, 295 KB
english, 2011
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