ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - Investigation of Mechanical Effects on Advanced Copper CMP
Jing, Jianfen, Ma, Zhiyong, Lin, Paul-Chang, Li, Pei, Xing, Charles, Gu, Yuan, Cai, Xinyuan, Yang, Xiaohua, Shiao, Danny, Yu, ChrisYear:
2010
Language:
english
DOI:
10.1149/1.3360680
File:
PDF, 277 KB
english, 2010