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[ECS ISTC/CSTIC 2009 (CISTC) - Shanghai, China (March 19 - March 20, 2009)] ECS Transactions - Effect of Polisher Kinematics in Reducing Average and Variance of Shear Force and Increasing Removal Rate in Copper CMP
Sampurno, Yasa, Philipossian, Ara, Theng, Sian, Nemoto, Takenao, Gu, Xun, Zhuang, Yun, Teramoto, Akinobu, Ohmi, TadahiroYear:
2009
Language:
english
DOI:
10.1149/1.3096487
File:
PDF, 7.84 MB
english, 2009