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[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Post Metallization Anneal Effects in HfO2 Based Capacitors with Various Gate Electrodes
Lu, Yi, Buiu, Octavian, Mitrovic, Ivona, Hall, Stephen, Chalker, Paul R., Potter, Richard, Nazarov, Alexei, Lysenko, V., Tyagulskii, I., Osiyuk, I., Vovk, Ya.Volume:
1
Year:
2006
Language:
english
DOI:
10.1149/1.2209301
File:
PDF, 461 KB
english, 2006