Analysis of Frictional Heating of Grooved and Flat CMP...

Journal of The Electrochemical Society 2004 Vol. 151; Iss. 12

Analysis of Frictional Heating of Grooved and Flat CMP Polishing Pads

Borucki, Len, Charns, Leslie, Philipossian, Ara
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1808635
File:
PDF, 872 KB
english, 2004
Conversion to is in progress
Conversion to is failed