Stabilization of Mo-Gate MOS Structures Using H[sub 2] Doping in Mo and High Temperature Forming Gas Annealing
Ohfuji, Shin-ichiVolume:
131
Year:
1984
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2115939
File:
PDF, 481 KB
english, 1984