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Evaluierung optischer Messmethoden am Beispiel mikromechanischer Bauelemente (Evaluation of Optical Measurement Techniques for the Characterization of Micromechanical Devices)
Kunz, Ulrich, Müller-Fiedler, RolandVolume:
73
Language:
german
Journal:
tm - Technisches Messen
DOI:
10.1524/teme.2006.73.5.281
Date:
January, 2006
File:
PDF, 1.08 MB
german, 2006