SPIE Proceedings [SPIE LAMILADIS '91: International Workshop--Laser Microtechnology and Laser Diagnostics of Surfaces - Chernovstsy, Ukraine (Tuesday 16 April 1991)] LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces - Titanium nitride: titanium silicide structures obtained by multipulse excimer laser irradiation

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