Thin Films of GeC Deposited Using a Unique Hollow Cathode...

MRS Proceedings 2006 / 1 Vol. 910

Thin Films of GeC Deposited Using a Unique Hollow Cathode Sputtering Technique

Huguenin-Love, James L., Soukup, Rodney J., Ianno, Natale J., Schrader, Jason S., Dalal, Vikram L.
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Volume:
910
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0910-A07-03
Date:
January, 2006
File:
PDF, 286 KB
english, 2006
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