[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23,...

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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - A Study on the Formation Processes and Microstructures of Ni-Silicide Films on Epi-Si1-xCx

Yoo, Jung-Ho, Chang, Hyun-Jin, Cho, Mann-Ho, Lee, Tae-Wan, Ko, Dae-Hong
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Volume:
13
Year:
2008
Language:
english
DOI:
10.1149/1.2911526
File:
PDF, 359 KB
english, 2008
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