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SPIE Proceedings [SPIE 1988 Intl Congress on Optical Science and Engineering - Hamburg, Germany (Monday 19 September 1988)] Laser Assisted Processing - A Repair Machine For VLSI Using Laser Induced Micro-Chemistry
Auvert, G., Tonneau, D., Guern, Y., Pelous, G., Laude, Lucien D., Rauscher, Gerhard K.Volume:
1022
Year:
1989
Language:
english
DOI:
10.1117/12.950101
File:
PDF, 474 KB
english, 1989