Thin Silicon Dioxide Using the Rapid Thermal Oxidation...

Thin Silicon Dioxide Using the Rapid Thermal Oxidation (RTO) Process for Trench Capacitors

Miyai, Yukio
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Volume:
135
Year:
1988
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2095542
File:
PDF, 751 KB
english, 1988
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