5MeV Si Ion Modification on Thermoelectric SiO2/SiO2+Cu...

MRS Proceedings 2011 / 1 Vol. 1354

5MeV Si Ion Modification on Thermoelectric SiO2/SiO2+Cu Multilayer Films

Smith, C., Budak, S., Jordan, T., Chacha, J., Chhay, B., Heidary, K., Johnson, R. B., Muntele, C., ILA, D.
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Volume:
1354
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.1344
Date:
January, 2011
File:
PDF, 172 KB
english, 2011
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