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Thermal agglomeration of single-crystalline Si layer on...

Thermal agglomeration of single-crystalline Si layer on buried SiO[sub 2] in ultrahigh vacuum

Nuryadi, Ratno, Ishikawa, Yasuhiko, Ono, Yukinori, Tabe, Michiharu
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Volume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1431956
File:
PDF, 679 KB
english, 2002
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