Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2002 Vol. 20; Iss. 1
Thermal agglomeration of single-crystalline Si layer on buried SiO[sub 2] in ultrahigh vacuum
Nuryadi, Ratno, Ishikawa, Yasuhiko, Ono, Yukinori, Tabe, MichiharuVolume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1431956
File:
PDF, 679 KB
english, 2002