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Spray Coating of Photoresist for 3D Microstructures with Different Geometries
Yu, Liming, Lee, Yong Yeow, Tay, Francis E H, Iliescu, CiprianVolume:
34
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/34/1/155
Date:
April, 2006
File:
PDF, 284 KB
english, 2006