Three-Body Microcontact Model of Rough Surfaces and Its...

Materials Science Forum 2006 Vol. 505-507

Three-Body Microcontact Model of Rough Surfaces and Its Application on Polishing of Wafer

Horng, Jeng Haur, Lee, J.S., Du, D.C.
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Volume:
505-507
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.505-507.445
File:
PDF, 439 KB
english, 2006
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