Computational Study on Polymer Filling Process in...

MRS Proceedings 2013 / 1 Vol. 1499

Computational Study on Polymer Filling Process in Nanoimprint Lithography for Bi-Layered Resist

Araki, Kosei, Yasuda, Masaaki, Horiba, Akira, Kawata, Hiroaki, Hirai, Yoshihiko
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
1499
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2013.413
Date:
January, 2013
File:
PDF, 4.80 MB
english, 2013
Conversion to is in progress
Conversion to is failed