Kraftmikroskopie durch Einzelpunktantastung an...

Kraftmikroskopie durch Einzelpunktantastung an Strukturkanten

Hüser, Dorothee, Häßler-Grohne, Wolfgang, Katzer, Klaus-Dieter, Hunecken, Jens, Fuß, Hans-Achim, Bosse, Harald
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Volume:
77
Language:
german
Journal:
tm - Technisches Messen
DOI:
10.1524/teme.2010.0080
Date:
January, 2010
File:
PDF, 662 KB
german, 2010
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