Combinatorial Study on In-Ga-Zn-O Semiconductor Films as Active-channel Layers for Thin-film Transistor
Iwasaki, Tatsuya, Itagaki, Naho, Den, Tohru, Kumomi, Hideya, Nomura, Kenji, Kamiya, Toshio, Hosono, HideoVolume:
928
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0928-GG10-04
Date:
January, 2006
File:
PDF, 109 KB
english, 2006