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Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization
Hajjam, Arash, Wilson, James C, Rahafrooz, Amir, Pourkamali, SiavashVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/12/125019
Date:
December, 2010
File:
PDF, 1.51 MB
english, 2010