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Surface Morphology and Roughness of Cu Thin Films Prepared by Ionized Cluster Beam Deposition
Cao, Bo, Yang, Tong Rui, Li, Gong Ping, Cho, Seong Jin, Kim, HeeVolume:
430-432
Langue:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.430-432.419
Date:
January, 2012
Fichier:
PDF, 1.51 MB
english, 2012