Advanced Process Control Expert System of CVD Membrane...

Advanced Process Control Expert System of CVD Membrane Thickness Based on Neural Network

Chang, Ming, Chen, Jen Cheng, Chang, Jui Wen, Heh, Jia Sheng
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Volume:
505-507
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.505-507.313
File:
PDF, 358 KB
english, 2006
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