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Advanced Process Control Expert System of CVD Membrane Thickness Based on Neural Network
Chang, Ming, Chen, Jen Cheng, Chang, Jui Wen, Heh, Jia ShengVolume:
505-507
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.505-507.313
File:
PDF, 358 KB
english, 2006