Gas Cluster Ion Beam Technology for Nano-Fabrication
Toyoda, Noriaki, Yamada, IsaoVolume:
82
Language:
english
Journal:
Advances in Science and Technology
DOI:
10.4028/www.scientific.net/AST.82.1
Date:
September, 2012
File:
PDF, 1.12 MB
english, 2012