ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Defectivity Avoidance in Chemical Mechanical Planarization: Role of Multi-Scale and Multi-Physics Interactions
Chandra, Abhijit, Karra, Pavan, Bastawros, AshrafYear:
2010
Language:
english
DOI:
10.1149/1.3489041
File:
PDF, 524 KB
english, 2010