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Pad Topography, Contact Area and Hydrodynamic Lubrication in Chemical-Mechanical Polishing
Borucki, Leonard John, Sun, Ting, Zhuang, Yun, Slutz, David, Philipossian, AraVolume:
1157
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1157-E01-02
Date:
January, 2009
File:
PDF, 1.35 MB
english, 2009