Electrical Properties of Aluminium Oxide Films Grown by Atomic Layer Deposition on n-Type 4H-SiC
Avice, Marc, Grossner, Ulrike, Monakhov, Edouard V., Grillenberger, Joachim, Nilsen, Ola, Fjellvåg, Helmer, Svensson, Bengt G.Volume:
483-485
Year:
2005
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.483-485.705
File:
PDF, 664 KB
english, 2005