[ECS 209th ECS Meeting - Denver, Colorado (May 7-May 12, 2006)] ECS Transactions - Characterization of Surface Preparation for Epitaxial SiGe Process using X-ray Reflectivity
Agnihotri, Dileep, Lee, Charlie Cj, Tai, Hsin, Chen, Arthur, Ma, Mike, Baxter, Steven, Gallegos, Jesus, Kalegaonkar, ShrikantVolume:
2
Year:
2007
Language:
english
DOI:
10.1149/1.2408944
File:
PDF, 348 KB
english, 2007