Chemical Vapor Deposition of Epitaxial Silicon-Germanium...

Chemical Vapor Deposition of Epitaxial Silicon-Germanium from Silane and Germane

Jang, Syun-Ming
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Volume:
142
Year:
1995
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2050015
File:
PDF, 1.66 MB
english, 1995
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