Automation of etching-pattern layout

Communications of the ACM 1971 / 11 Vol. 14; Iss. 11

Automation of etching-pattern layout

Aramaki, Itaru, Kawabata, Tomokazu, Arimoto, Kazuhiko
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Volume:
14
Language:
english
Journal:
Communications of the ACM
DOI:
10.1145/362854.362886
Date:
November, 1971
File:
PDF, 860 KB
english, 1971
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