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A Direct Method of Determining Complex Depth Profiles of Residual Stresses in Thin Films on a Nanoscale - Mechanics of Residually Stressed Systems
Massl, Stefan, Keckes, Jozef, Pippan, ReinhardVolume:
1052
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1052-DD03-06
Date:
January, 2007
File:
PDF, 524 KB
english, 2007