Electrical Detection of Oscillations in Micro- and Nano- Cantilevers Using Harmonic Detection of Resonance
Gaillard, J., Ciocan, Razvan, Skove, Malcolm J., Rao, Apparao M.Volume:
888
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0888-V02-03
Date:
January, 2005
File:
PDF, 820 KB
english, 2005