SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser-based Micro- and Nanoprocessing IX - To use or not to use (direct laser interference patterning), that is the question
Klotzbach, Udo, Washio, Kunihiko, Arnold, Craig B., Lasagni, A. F., Roch, T., Berger, J., Kunze, T., Lang, V., Beyer, E.Volume:
9351
Year:
2015
Language:
english
DOI:
10.1117/12.2081976
File:
PDF, 1.09 MB
english, 2015