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Investigation of giant step bunching in 4H-SiC homoepitaxial growth: Proposal of cluster effect model
Ishida, Yuuki, Yoshida, SadafumiVolume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.061301
Date:
June, 2015
File:
PDF, 1.42 MB
english, 2015