[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Low Temperature Wafer Bonding
Fournel, Frank, Moriceau, H., Ventosa, Caroline, Libralesso, Laure, Le Tiec, Yannick, Signamarcheix, Thomas, Rieutord, FrançoisVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2982902
File:
PDF, 2.31 MB
english, 2008