Research on the Polishing Performance of CMP Slurry for the...

Research on the Polishing Performance of CMP Slurry for the Sapphire Crystal

Gao, Shang, Kang, Ren Ke, Jin, Zhu Ji, Dong, Zhi Gang
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Volume:
325
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.325.457
Date:
August, 2011
File:
PDF, 3.23 MB
english, 2011
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