![](/img/cover-not-exists.png)
Research on the Polishing Performance of CMP Slurry for the Sapphire Crystal
Gao, Shang, Kang, Ren Ke, Jin, Zhu Ji, Dong, Zhi GangVolume:
325
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.325.457
Date:
August, 2011
File:
PDF, 3.23 MB
english, 2011