Low Doped 3C-SiC Layers Deposited by the Vapour-Liquid-Solid Mechanism on 6H-SiC Substrates
Lorenzzi, Jean, Zoulis, Georgios, Kim-Hak, Olivier, Jegenyes, Nikoletta, Carole, Davy, Cauwet, François, Juillaguet, Sandrine, Ferro, Gabriel, Camassel, JeanVolume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.171
Date:
April, 2010
File:
PDF, 651 KB
english, 2010