Structural Analysis of Pore Seal Layer Fabricated by...

MRS Proceedings 2013 Vol. 1559

Structural Analysis of Pore Seal Layer Fabricated by Wet-process on Porous Low-k Films

Ono, Shoko S., Kayaba, Yasuhisa, Suzuki, Tsuneji, Kohmura, Kazuo, Tanaka, Hirofumi
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Volume:
1559
Year:
2013
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2013.690
File:
PDF, 576 KB
english, 2013
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