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Comment on “Effects of Corona-Discharge-Induced Oxygen Ion Beams and Electric Fields on Silicon Oxidation Kinetics” [J. Electrochem. Soc., 132, 1659]
Rajsuman, R.Volume:
135
Year:
1988
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2148715
File:
PDF, 253 KB
english, 1988