Antimony Diffusion in Strained and Relaxed Si1-xGex

Defect and Diffusion Forum 1997 Vol. 143-147

Antimony Diffusion in Strained and Relaxed Si1-xGex

Paine, A.D.N., Willoughby, Arthur F.W., Morooka, Masami, Bonar, Janet M., Phillips, P., Dowsett, M.G., Cooke, G.
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Volume:
143-147
Year:
1997
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.143-147.1131
File:
PDF, 310 KB
1997
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