Ti-Ca-P Films Formed by RF Magnetron Sputtering Method...

Materials Science Forum 2007 Vol. 544-545

Ti-Ca-P Films Formed by RF Magnetron Sputtering Method Using Dual Targets

Watazu, Akira, Kimoto, Katsuhiko, Tsutomu, Sonoda, Tanaka, Kinya, Sawada, Tomoji, Toyoda, Minoru, Saito, Naobumi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
544-545
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.544-545.495
File:
PDF, 1.14 MB
english, 2007
Conversion to is in progress
Conversion to is failed