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Tantalum-Chromium Alloy Films as Contact Materials for a Capacitor Using Sr[sub 0.9]Bi[sub 2.1]Ta[sub 2]O[sub 9] for Ferroelectric Memories
Koiwa, Ichiro, Yamane, Haruki, Kobayashi, HiroyoVolume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393383
File:
PDF, 413 KB
english, 2000