[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May...

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[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Influence of Interfacial Oxygen and Carbon on Misfit Dislocation Generation in SiGe Epitaxial Layers

Fukuda, Masahiro, Shimamune, Yosuke, Tanahashi, Katsuto, Ikeda, Keiji, Nishikawa, Masatoshi, Maekawa, Hirotaka, Tamura, Naoyoshi, Mori, Toshifumi, Shimizu, Atsuo, Kase, Masataka
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Year:
2009
Language:
english
DOI:
10.1149/1.3118947
File:
PDF, 1.36 MB
english, 2009
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