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ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - Analytical Characterization of ALD Thin Film Precursors
Clancy, Phil, Milstein, Lisa S., Gotts, Hugh, Cowles, Dan, Chitrathorn, Piyamit, Wan, Zhiwen, Vanatta, Lynn, Bales, QingqingYear:
2010
Language:
english
DOI:
10.1149/1.3375621
File:
PDF, 325 KB
english, 2010