PL Imaging Study of In-Grown Stacking Faults in 4H-SiC...

Materials Science Forum 2009 Vol. 615-617

PL Imaging Study of In-Grown Stacking Faults in 4H-SiC Epitaxial Layer

Hattori, Ryo, Shimizu, R., Chiba, I., Hamano, K., Oomori, Tatsuo
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Volume:
615-617
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.615-617.129
File:
PDF, 610 KB
english, 2009
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