Synthesis of high-quality AlN films on (La,Sr) (Al,Ta)O3...

Synthesis of high-quality AlN films on (La,Sr) (Al,Ta)O3 substrates by pulsed laser deposition

Wang, Wenliang, Yang, Weijia, Liu, Zuolian, Lin, Yunhao, Zhou, Shizhong, Lin, Zhiting, Wang, Haiyan, Qian, Huirong, Li, Guoqiang
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Volume:
139
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2014.10.148
Date:
January, 2015
File:
PDF, 2.27 MB
english, 2015
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