ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Correlation of Pad Topography, Friction Force and Removal Rate during Tungsten Chemical Mechanical Planarization
Sampurno, Yasa, Rice, Adam, Zhuang, Yun, Philipossian, AraYear:
2011
Language:
english
DOI:
10.1149/1.3567648
File:
PDF, 299 KB
english, 2011