Fabrication of GaSb Microlenses by Photo and E-Beam...

Solid State Phenomena 2004 Vol. 99-100

Fabrication of GaSb Microlenses by Photo and E-Beam Lithography and Dry Etching

Papis, E., Piotrowska, Anna, Piotrowski, T.T., Gołaszewska, K., Ilka, L., Kruszka, R., Ratajczak, Jacek, Kątcki, J., Wróbel, J., Aleszkiewicz, M., Łukaskiewicz, R.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
99-100
Year:
2004
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.99-100.83
File:
PDF, 812 KB
english, 2004
Conversion to is in progress
Conversion to is failed