Fully Ion Implanted Vertical p-i-n Diodes on High Purity...

Materials Science Forum 2012 / 5 Vol. 717-720

Fully Ion Implanted Vertical p-i-n Diodes on High Purity Semi-Insulating 4H-SiC Wafers

Nipoti, Roberta, Nath, Anindya, Tian, Yong Lai, Tamarri, Fabrizio, Moscatelli, Francesco, De Nicola, Pietro, Rao, Mulpuri V.
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Volume:
717-720
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.717-720.985
Date:
May, 2012
File:
PDF, 311 KB
english, 2012
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