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Characterization of “TEMPOS”: A new Tunable Electronic Material with Pores in Oxide on Silicon
Fink, Dietmar, Petrov, Alexander, Hoppe, Kurt, Fahrner, Wolfgang R.Volume:
792
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-792-R7.9
Date:
January, 2003
File:
PDF, 487 KB
english, 2003